S. R. Alety

Citric Acid as a Complexing Agent in Chemical Mechanical Polishing Slurries for Cobalt Films for Interconnect Applications

R. Popuri, K. V. Sagi, S. R. Alety et al. · ECS Journal of Solid State Science and Technology · 2017 · 73 citations · Full text

Cobalt Films, Engineering, Chemistry +17

Chemical Mechanical Polishing of Chemical Vapor Deposited Co Films with Minimal Corrosion in the Cu/Co/Mn/SiCOH Patterned Structures

K. V. Sagi, Lieve Teugels, Marleen H. van der Veen et al. · ECS Journal of Solid State Science and Technology · 2017 · 48 citations · Full text

Engineering, Chemistry, Mineral Processing +18

Cleaning Solutions for Ultrathin Co Barriers for Advanced Technology Nodes

S. R. Alety, Uma Rames Krishna Lagudu, R. Popuri et al. · ECS Journal of Solid State Science and Technology · 2017 · 29 citations

Materials Science, Chemical Engineering, Corrosion Protection +15

Potassium Permanganate-Based Slurry to Reduce the Galvanic Corrosion of the Cu/Ru/TiN Barrier Liner Stack during CMP in the BEOL Interconnects

K. V. Sagi, H. P. Amanapu, S. R. Alety et al. · ECS Journal of Solid State Science and Technology · 2016 · 27 citations · Full text

Engineering, Mechanical Engineering, Beol Interconnects +16

Role of Ce³⁺Ions in Achieving High Silicon Nitride Polish Rates

S. R. Alety, K. V. Sagi, S. V. Babu · ECS Journal of Solid State Science and Technology · 2017 · 21 citations · Full text

Materials Science, Materials Engineering, Chemical Engineering +12