R. Popuri

Citric Acid as a Complexing Agent in Chemical Mechanical Polishing Slurries for Cobalt Films for Interconnect Applications

R. Popuri, K. V. Sagi, S. R. Alety et al. · ECS Journal of Solid State Science and Technology · 2017 · 73 citations · Full text

Cobalt Films, Engineering, Chemistry +17

Ammonium Persulfate and Potassium Oleate Containing Silica Dispersions for Chemical Mechanical Polishing for Cobalt Interconnect Applications

C. K. Ranaweera, N. K. Baradanahalli, R. Popuri et al. · ECS Journal of Solid State Science and Technology · 2018 · 59 citations · Full text

Engineering, Potassium Oleate, Material Innovation +21

Potassium Oleate as a Dissolution and Corrosion Inhibitor during Chemical Mechanical Planarization of Chemical Vapor Deposited Co Films for Interconnect Applications

R. Popuri, H. P. Amanapu, C. K. Ranaweera et al. · ECS Journal of Solid State Science and Technology · 2017 · 57 citations · Full text

Engineering, Potassium Oleate, Chemistry +17

Cleaning Solutions for Ultrathin Co Barriers for Advanced Technology Nodes

S. R. Alety, Uma Rames Krishna Lagudu, R. Popuri et al. · ECS Journal of Solid State Science and Technology · 2017 · 29 citations

Materials Science, Chemical Engineering, Corrosion Protection +15

Soft Chemical Mechanical Polishing Pad for Oxide CMP Applications

Nandan Baradanahalli Kenchappa, R. Popuri, Ashwin Chockkalingam et al. · ECS Journal of Solid State Science and Technology · 2021 · 27 citations · Full text

Materials Science, Materials Engineering, Chemical Engineering +12