Concepedia

Author

R. Popuri

Clarkson University

Also Known As

R. Popuri, Ramtej Popuri

7

Publications

272

Citations

6

H-Index

19

Concepts

All Affiliations

Clarkson UniversityIBM (United States)
RP

About

R. Popuri is an author at Clarkson University specializing in engineering, chemical engineering, and surface science.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

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6

270

2

Chemical Engineering

5

5

245

3

Chemistry

4

4

218

4

Materials Engineering

2

2

86

5

Electrical Engineering

1

1

25

R. Popuri

×

6

Publications

270

Citations

6

H-Index

YearCitations

Citric Acid as a Complexing Agent in Chemical Mechanical Polishing Slurries for Cobalt Films for Interconnect Applications

R. Popuri, K. V. Sagi, S. R. Alety,

ECS Journal of Solid State Science and Technology

2017

73

Ammonium Persulfate and Potassium Oleate Containing Silica Dispersions for Chemical Mechanical Polishing for Cobalt Interconnect Applications

C. K. Ranaweera, N. K. Baradanahalli, R. Popuri,

ECS Journal of Solid State Science and Technology

2018

59

Potassium Oleate as a Dissolution and Corrosion Inhibitor during Chemical Mechanical Planarization of Chemical Vapor Deposited Co Films for Interconnect Applications

R. Popuri, H. P. Amanapu, C. K. Ranaweera,

ECS Journal of Solid State Science and Technology

2017

57

Cleaning Solutions for Ultrathin Co Barriers for Advanced Technology Nodes

S. R. Alety, Uma Rames Krishna Lagudu, R. Popuri,

ECS Journal of Solid State Science and Technology

2017

29

Soft Chemical Mechanical Polishing Pad for Oxide CMP Applications

Nandan Baradanahalli Kenchappa, R. Popuri, Ashwin Chockkalingam,

ECS Journal of Solid State Science and Technology

2021

27

Development of various designs of low-power, MEMS valves for fluidic applications

Andres M. Cardenas‐Valencia, Jay Dlutowski, John Bumgarner,

Sensors and Actuators A Physical

2006

25

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