Concepedia

Author

Valentyn Ishchuk

Technische Universität IlmenauORCID

Also Known As

V. Ishchuk, Valentyn Ishchuk

12

Publications

262

Citations

9

H-Index

35

Concepts

All Affiliations

Technische Universität IlmenauLawrence Berkeley National Laboratory
VI

About

Valentyn Ishchuk is an author at Technische Universität Ilmenau specializing in engineering, applied physics, and microelectronics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

7

7

199

2

Applied Physics

6

6

186

3

Electrical Engineering

4

4

154

4

Materials Science

3

3

94

5

Computer Engineering

1

1

34

Valentyn Ishchuk

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9

Publications

250

Citations

9

H-Index

YearCitations

Charging effect simulation model used in simulations of plasma etching of silicon

Valentyn Ishchuk, B. Volland, Maik Hauguth,

Journal of Applied Physics

2012

48

Pattern-generation and pattern-transfer for single-digit nano devices

Ivo W. Rangelow, Ahmad Ahmad, Tzvetan Ivanov,

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

2016

42

Advanced electric-field scanning probe lithography on molecular resist using active cantilever

Marcus Kaestner, Cemal Aydogan, Tzvetan Ivanov,

Journal of Micro/Nanolithography MEMS and MOEMS

2015

34

Large area fast-AFM scanning with active “Quattro” cantilever arrays

Ahmad Ahmad, Nikolay Nıkolov, Tihomir Angelov,

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

2016

34

Profile simulation model for sub-50 nm cryogenic etching of silicon using SF6/O2 inductively coupled plasma

Valentyn Ishchuk, Deirdre L. Olynick, Zuwei Liu,

Journal of Applied Physics

2015

30

Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography

Tihomir Angelov, Ahmad Ahmad, Elshad Guliyev,

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

2016

22

Advanced electric-field scanning probe lithography on molecular resist using active cantilever

Marcus Kaestner, Cemal Aydogan, Hubert-Seweryn Lipowicz,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2015

17

Scanning probe-based high-accuracy overlay alignment concept for lithography applications

Valentyn Ishchuk, Elshad Guliyev, Cemal Aydogan,

Applied Physics A

2016

13

ViPER: simulation software for high aspect ratio plasma etching of silicon

Valentyn Ishchuk, B. Volland, Ivo W. Rangelow

Microsystem Technologies

2013

10

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