Concepedia

Author

Cemal Aydogan

Technische Universität Ilmenau

Also Known As

Cemal Aydogan

9

Publications

90

Citations

5

H-Index

7

Concepts

All Affiliations

Technische Universität Ilmenau
CA

About

Cemal Aydogan is an author at Technische Universität Ilmenau specializing in engineering, computer-aided design, and microfabrication.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

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Microelectronics

1

1

13

3

3D Printing

1

1

13

4

Calibration

1

1

13

5

Computer-aided Design

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13

Cemal Aydogan

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4

Publications

75

Citations

4

H-Index

YearCitations

Advanced electric-field scanning probe lithography on molecular resist using active cantilever

Marcus Kaestner, Cemal Aydogan, Tzvetan Ivanov,

Journal of Micro/Nanolithography MEMS and MOEMS

2015

34

Advanced electric-field scanning probe lithography on molecular resist using active cantilever

Marcus Kaestner, Cemal Aydogan, Hubert-Seweryn Lipowicz,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2015

17

Scanning probe-based high-accuracy overlay alignment concept for lithography applications

Valentyn Ishchuk, Elshad Guliyev, Cemal Aydogan,

Applied Physics A

2016

13

Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions

Jens-Peter Zoellner, Mathias Holz, Alexander Reum,

2018

11

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