Concepedia

Cemal Aydogan

CA

4

Publications

75

Citations

4

H-Index

2015

Active since

Affiliations

Technische Universität Ilmenau(Current)

Cemal Aydogan is an author at Technische Universität Ilmenau specializing in engineering, computer-aided design, and microfabrication.

Top concepts

Publications per year

2015–2018

4

Publications

4

Advanced electric-field scanning probe lithography on molecular resist using active cantilever

Marcus Kaestner, Cemal Aydogan, Tzvetan Ivanov et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 34 citations

Advanced electric-field scanning probe lithography on molecular resist using active cantilever

Marcus Kaestner, Cemal Aydogan, Hubert-Seweryn Lipowicz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 17 citations

Scanning probe-based high-accuracy overlay alignment concept for lithography applications

Valentyn Ishchuk, Elshad Guliyev, Cemal Aydogan et al. · Applied Physics A · 2016 · 13 citations

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Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions

Jens-Peter Zoellner, Mathias Holz, Alexander Reum et al. · 2018 · 11 citations

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