Elshad Guliyev

Pattern-generation and pattern-transfer for single-digit nano devices

Ivo W. Rangelow, Ahmad Ahmad, Tzvetan Ivanov et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 42 citations · Full text

Engineering, Electron-beam Lithography, Pattern Transfer +20

Scanning probes in nanostructure fabrication

Marcus Kaestner, Tzvetan Ivanov, Andreas Schuh et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2014 · 37 citations

Nanosensors, Engineering, Nanodevices +23

Large area fast-AFM scanning with active “Quattro” cantilever arrays

Ahmad Ahmad, Nikolay Nıkolov, Tihomir Angelov et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 34 citations

Engineering, Lithography Capabilities, Microscopy +23

Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy

Ivo W. Rangelow, Marcus Kaestner, Tzvetan Ivanov et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2018 · 34 citations

Atomic Force Microscopy, New Nanotechnology Instrument, Engineering +19

Micromachined self-actuated piezoresistive cantilever for high speed SPM

Thomas Michels, Elshad Guliyev, Michal Klukowski et al. · Microelectronic Engineering · 2012 · 26 citations

Engineering, Micromachines, Microfabrication +7