Concepedia

Thomas Michels

TM

Statistics

Publications

4

Citations

176

H-Index

4

Active since

2012

Affiliations

National Institute of Standards and Technology(Current)

Technische Universität Ilmenau

Thomas Michels is an author at National Institute of Standards and Technology specializing in engineering, microfabrication, and nanotechnology.

ORCID

Top concepts

Publications per year

2012–2017

4

Publications

4

The Nanolithography Toolbox

Krishna C. Balram, Daron Westly, Marcelo Davanço et al. · Journal of Research of the National Institute of Standards and Technology · 2016 · 78 citations · Full text

Review of scanning probe micromachining and its applications within nanoscience

Thomas Michels, Ivo W. Rangelow · Microelectronic Engineering · 2014 · 61 citations

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Micromachined self-actuated piezoresistive cantilever for high speed SPM

Thomas Michels, Elshad Guliyev, Michal Klukowski et al. · Microelectronic Engineering · 2012 · 26 citations

, , +7

Two-dimensional imaging and modification of nanophotonic resonator modes using a focused ion beam

William McGehee, Thomas Michels, Vladimir Aksyuk et al. · Optica · 2017 · 11 citations · Full text

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