Concepedia

Michal Klukowski

MK

Statistics

Publications

2

Citations

51

H-Index

2

Active since

2012

Affiliations

Technische Universität Ilmenau(Current)

Michal Klukowski is an author at Technische Universität Ilmenau specializing in microfabrication, mechanical engineering, and engineering.

Top concepts

Publications per year

2012–2012

2

Publications

2

Micromachined self-actuated piezoresistive cantilever for high speed SPM

Thomas Michels, Elshad Guliyev, Michal Klukowski et al. · Microelectronic Engineering · 2012 · 26 citations

, , +7

Quasi-monolithic integration of silicon-MEMS with piezoelectric actuators for high-speed non-contact atomic force microscopy

Elshad Guliyev, B. Volland, Y. Sarov et al. · Measurement Science and Technology · 2012 · 25 citations

, , +23

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