Eizo Miyauchi

GaAs cleaning with a hydrogen radical beam gun in an ultrahigh-vacuum system

Sumio Sugata, A. Takamori, N. Takado et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 86 citations

Materials Science, Semiconductors, Electrical Engineering +15

Cleaning of MBE GaAs Substrates by Hydrogen Radical Beam Irradiation

Akira Takamori, Sumio Sugata, Kiyoshi Asakawa et al. · Japanese Journal of Applied Physics · 1987 · 84 citations

Electrical Engineering, Chemical Engineering, Engineering +13

Calculation of electronic structure and photoabsorption spectra of monosilane molecules SiH4, SiF4, and SiCl4

Hideaki Ishikawa, Kazumi Fujima, Hirohiko Adachi et al. · The Journal of Chemical Physics · 1991 · 48 citations

Engineering, Photoabsorption Spectra, Theoretical Inorganic Chemistry +17

GaAs Growth Using an MBE System Connected with a 100 kV UHV Maskless Ion Implanter

Akira Takamori, Eizo Miyauchi, Hiroshi Arimoto et al. · Japanese Journal of Applied Physics · 1984 · 47 citations

Electrical Engineering, Gaas Growth, Mbe Grown Gaas +15

Maskless ion beam writing of precise doping patterns with Be and Si for molecular beam epitaxially grown multilayer GaAs

Eizo Miyauchi, Tetsuo Morita, Akira Takamori et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 45 citations

Engineering, Ion Beam Instrumentation, Integrated Circuits +18