N. Takado

GaAs cleaning with a hydrogen radical beam gun in an ultrahigh-vacuum system

Sumio Sugata, A. Takamori, N. Takado et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 86 citations

Materials Science, Semiconductors, Electrical Engineering +15

Reactive ion beam etching of Y-Ba-Cu-O superconductors

S. Matsui, N. Takado, H. Tsuge et al. · Applied Physics Letters · 1988 · 66 citations

Materials Science, Superconducting Material, Electrical Engineering +12

Vertical to surface transmission electrophotonic device with selectable output light channels

Y. Tashiro, N. Hamao, M. Sugimoto et al. · Applied Physics Letters · 1989 · 58 citations

Engineering, Optical Transmission System, Transmission Electrophotonic Device +16

Chemically enhanced focused ion beam etching of deep grooves and laser-mirror facets in GaAs under Cl2 gas irradiation using a fine nozzle

N. Takado, K. Asakawa, T. Yuasa et al. · Applied Physics Letters · 1987 · 32 citations

Optical Materials, Engineering, Electron-beam Lithography +19

Chlorine-Based Smooth Reactive Ion Beam Etching of Indium-Containing III-V Compound Semiconductor

Takashi Yoshikawa, Sigeru Kohmoto, Masami Anan et al. · Japanese Journal of Applied Physics · 1992 · 28 citations

Materials Science, Electrical Engineering, Low Cl 2 +14