47
Publications
1.5K
Citations
23
H-Index
1984
Active since
K. Asakawa is an author at Photonics Electronics Technology Research Association specializing in engineering, applied physics, and optoelectronics.
Top concepts
EngineeringApplied PhysicsOptoelectronicsPhotonicsPhysicsOptical PropertiesOptical MaterialsPhotonic CrystalsMaterial ScienceElectrical Engineering
Publications per year
1984–2015
47
47
GaAs and AlGaAs anisotropic fine pattern etching using a new reactive ion beam etching system
K. Asakawa, Sumio Sugata · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 77 citations
Materials Science, High Aspect-ratio Anisotropic, Electrical Engineering +13
Reactive ion beam etching of Y-Ba-Cu-O superconductors
S. Matsui, N. Takado, H. Tsuge et al. · Applied Physics Letters · 1988 · 66 citations
Materials Science, Superconducting Material, Electrical Engineering +12
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