Sumio Sugata

GaAs cleaning with a hydrogen radical beam gun in an ultrahigh-vacuum system

Sumio Sugata, A. Takamori, N. Takado et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 86 citations

Materials Science, Semiconductors, Electrical Engineering +15

Cleaning of MBE GaAs Substrates by Hydrogen Radical Beam Irradiation

Akira Takamori, Sumio Sugata, Kiyoshi Asakawa et al. · Japanese Journal of Applied Physics · 1987 · 84 citations

Electrical Engineering, Chemical Engineering, Engineering +13

GaAs and AlGaAs anisotropic fine pattern etching using a new reactive ion beam etching system

K. Asakawa, Sumio Sugata · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 77 citations

Materials Science, High Aspect-ratio Anisotropic, Electrical Engineering +13

Damage and contamination-free GaAs and AlGaAs etching using a novel ultrahigh-vacuum reactive ion beam etching system with etched surface monitoring and cleaning method

K. Asakawa, Sumio Sugata · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 43 citations

Engineering, Optoelectronic Devices, Integrated Circuits +18

GaAs and GaAlAs Equi-Rate Etching Using a New Reactive Ion Beam Etching System

Kiyoshi Asakawa, Sumio Sugata · Japanese Journal of Applied Physics · 1983 · 37 citations

Engineering, Electron-beam Lithography, Vacuum Device +16