Stefaan Van Huylenbroeck

Towards THz SiGe HBTs

P. Chevalier, T.F. Meister, B. Heinemann et al. · 2011 · 95 citations · Full text

Engineering, Electrical Engineering, Electronic Materials +9

Investigation of PECVD dielectrics for nondispersive metal-insulator-metal capacitors

Stefaan Van Huylenbroeck, Stefaan Decoutere, R. Venegas et al. · IEEE Electron Device Letters · 2002 · 50 citations

Natural Sciences, Electrical Engineering, Materials Science +16

Hybrid 14nm FinFET - Silicon Photonics Technology for Low-Power Tb/s/mm ² Optical I/O

Michał Rakowski, Yuseok Ban, Peter De Heyn et al. · 2018 · 46 citations

Engineering, Electrical Engineering, Microelectronics +16

Small Pitch, High Aspect Ratio Via-Last TSV Module

Stefaan Van Huylenbroeck, Michele Stucchi, Yunlong Li et al. · 2016 · 39 citations

Engineering, Electrical Engineering, Materials Science +17

Copper through silicon via induced keep out zone for 10nm node bulk FinFET CMOS technology

Wei Guo, Victor Moroz, Geert Van der Plas et al. · 2013 · 35 citations

Engineering, Electrical Engineering, Electronic Materials +16