Concepedia

Aritoshi Sugimoto

AS

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Publications

4

Citations

124

H-Index

4

Active since

1988

Affiliations

Hitachi (Japan)(Current)

Aritoshi Sugimoto is an author at Hitachi (Japan) specializing in semiconductor devices, engineering, and microelectronics.

Publications per year

1988–2007

4

Publications

4

A new defect distribution metrology with a consistent discrete exponential formula and its applications

Hiroki Sato, Masami Ikota, Aritoshi Sugimoto et al. · IEEE Transactions on Semiconductor Manufacturing · 1999 · 50 citations

Engineering, Manufacturing Engineering, Microelectronics +16

Proposal for a new submicron dimension reference for an electron beam metrology system

Yoshinori Nakayama, Shinji Okazaki, Aritoshi Sugimoto · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 49 citations

Engineering, Materials Engineering, Materials Science +17

A Discussion on How to Define the Tolerance for Line-Edge or Linewidth Roughness and Its Measurement Methodology

Atsuko Yamaguchi, Robert Steffen, Hiroki Kawada et al. · IEEE Transactions on Semiconductor Manufacturing · 2007 · 13 citations

Engineering, Electrical Engineering, Microelectronics +16

An Advanced Defect-Monitoring Test Structure for Electrical Screening and Defect Localization

Y. Hamamura, Tetsuo KUMAZAWA, Kazuyuki Tsunokuni et al. · IEEE Transactions on Semiconductor Manufacturing · 2004 · 12 citations

Natural Sciences, Electrical Engineering, Materials Science +14

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