Hiroki Kawada

Switching and memory phenomena in Langmuir–Blodgett films

K Sakai, Hiro Matsuda, Hiroki Kawada et al. · Applied Physics Letters · 1988 · 76 citations

Memory Phenomena, Engineering, Emerging Memory Technology +16

Characterization of line-edge roughness in resist patterns and estimations of its effect on device performance

Atsuko Yamaguchi, Ryuta Tsuchiya, Hiroshi Fukuda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 53 citations

Engineering, Measurement, Education +17

Metrology of LER: influence of line-edge roughness (LER) on transistor performance

Atsuko Yamaguchi, Katsuhiko Ichinose, Satoshi Shimamoto et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 42 citations

Bias-free measurement of LER/LWR with low damage by CD-SEM

Atsuko Yamaguchi, Robert Steffen, Hiroki Kawada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 40 citations

Engineering, Measurement, Education +18

Analysis of Line-edge Roughness in Resist Patterns and Its Transferability as Origins of Device Performance Degradation and Variation

Atsuko Yamaguchi, Hiroshi Fukuda, Hiroki Kawada et al. · Journal of Photopolymer Science and Technology · 2003 · 24 citations · Full text

Electrical Engineering, Engineering, Resistor +12