Xiewen Wang

Direct tunneling gate leakage current in transistors with ultrathin silicon nitride gate dielectric

Yee‐Chia Yeo, Qiang Lü, Wen-Chin Lee et al. · IEEE Electron Device Letters · 2000 · 171 citations

Electrical Engineering, Engineering, Tunneling Microscopy +12

Electrical properties of high-quality ultrathin nitride/oxide stack dielectrics

Ying Shi, Xiewen Wang, Tso-Ping Ma · IEEE Transactions on Electron Devices · 1999 · 64 citations

Materials Science, Stack Dielectrics, Electrical Engineering +13

Highly Reliable Silicon Nitride Thin Films Made by Jet Vapor Deposition

Xiewen Wang, Tso-Ping Ma, Guang-Ji Cui et al. · Japanese Journal of Applied Physics · 1995 · 23 citations

Materials Science, Materials Engineering, Electrical Engineering +13

Tunneling leakage current in ultrathin (<4 nm) nitride/oxide stack dielectrics

Ying Shi, Xiewen Wang, T.P. Ma · IEEE Electron Device Letters · 1998 · 20 citations

Stack Dielectrics, Electrical Engineering, Semiconductor Device +14

Molybdenum metal gate MOS technology for post-SiO/sub 2/ gate dielectrics

Qiang Lu, R. Lin, P. Ranade et al. · 2002 · 13 citations

Materials Science, Materials Engineering, Electrical Engineering +14