Concepedia

Salem Mullen

SM

4

Publications

57

Citations

4

H-Index

2011

Active since

Affiliations

SunEdison (United States)(Current)

Salem Mullen is an author at SunEdison (United States) specializing in applied physics, engineering, and materials science.

Top concepts

Publications per year

2011–2014

4

Publications

4

Progress in Spin-on Hard Mask Materials for Advanced Lithography

Munirathna Padmanaban, JoonYeon Cho, Takanori Kudo et al. · Journal of Photopolymer Science and Technology · 2014 · 24 citations · Full text

, , +13

EUV underlayer materials for 22nm HP and beyond

Huirong Yao, Zachary Bogusz, Jianhui Shan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 13 citations

, , +16

New spin-on metal hardmask materials for lithography processes

Huirong Yao, Salem Mullen, Elizabeth Wolfer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 10 citations

Functional Properties of Novel Metallic Hard Masks

Murirathna Padmanaban, Joon Yeon Cho, Huirong Yao et al. · Journal of Photopolymer Science and Technology · 2013 · 10 citations · Full text

, , +17

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