Concepedia

Elizabeth Wolfer

EW

3

Publications

44

Citations

3

H-Index

2013

Active since

Affiliations

SunEdison (United States)(Current)

Elizabeth Wolfer is an author at SunEdison (United States) specializing in engineering, microfabrication, and applied physics.

Top concepts

Publications per year

2013–2014

3

Publications

3

Progress in Spin-on Hard Mask Materials for Advanced Lithography

Munirathna Padmanaban, JoonYeon Cho, Takanori Kudo et al. · Journal of Photopolymer Science and Technology · 2014 · 24 citations · Full text

, , +13

New spin-on metal hardmask materials for lithography processes

Huirong Yao, Salem Mullen, Elizabeth Wolfer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 10 citations

Functional Properties of Novel Metallic Hard Masks

Murirathna Padmanaban, Joon Yeon Cho, Huirong Yao et al. · Journal of Photopolymer Science and Technology · 2013 · 10 citations · Full text

, , +17

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