Munirathna Padmanaban

Statistics

Publications

Citations

189

H-Index

Active since

1983

Affiliations

Indian Institute of Technology Delhi(Current)

SunEdison (United States)

Clariant (United States)

Munirathna Padmanaban is an author at Indian Institute of Technology Delhi specializing in materials science, natural sciences, and polymer chemistry.

Publications per year

1983–2014

Publications

Photodecomposable bases. A novel concept to stabilize chemically amplified resists.

Satoru Funato, Yohei Kinoshita, Takanori Kudo et al. · Journal of Photopolymer Science and Technology · 1995 · 38 citations · Full text

Natural Sciences, Chemistry, Materials Science +11

Progress in Spin-on Hard Mask Materials for Advanced Lithography

Munirathna Padmanaban, JoonYeon Cho, Takanori Kudo et al. · Journal of Photopolymer Science and Technology · 2014 · 26 citations · Full text

Engineering, Materials Engineering, Materials Science +16

CD changes of 193-nm resists during SEM measurement

Takanori Kudo, Jun-Bom Bae, Ralph R. Dammel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +13

Configurational sequence lengths in polyacrylonitrile and poly(acrylonitrile-CO-haloalkyl acrylate/methacrylate)s determined by 13C n.m.r.

P. Bajaj, Munirathna Padmanaban, R. P. GANDHI · Polymer · 1985 · 16 citations

Natural Sciences, Chemistry, Materials Science +9

Bottom Anti-Reflective Coatings for DUV Lithography.

Wenbing Kang, Hatsuyuki Tanaka, Ken Kimura et al. · Journal of Photopolymer Science and Technology · 1997 · 16 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

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