Concepedia

Satoru Funato

SF

4

Publications

79

Citations

4

H-Index

1995

Active since

Affiliations

Sysmex (Japan)(Current)

Satoru Funato is an author at Sysmex (Japan) specializing in engineering, materials science, and organic chemistry.

Top concepts

EngineeringMaterial ScienceChemistryPhotochemistryApplied PhysicsOrganic ChemistryOptical PropertiesOptoelectronicsPolymer ChemistryHealth

Publications per year

1995–1997

4

Publications

4

Photodecomposable bases. A novel concept to stabilize chemically amplified resists.

Satoru Funato, Yohei Kinoshita, Takanori Kudo et al. · Journal of Photopolymer Science and Technology · 1995 · 38 citations · Full text

Materials Science, Medicinal Chemistry, Supramolecular Photochemistry +15

Bottom Anti-Reflective Coatings for DUV Lithography.

Wenbing Kang, Hatsuyuki Tanaka, Ken Kimura et al. · Journal of Photopolymer Science and Technology · 1997 · 16 citations · Full text

Engineering, Duv Lithography, Barc Materials +17

Application of photodecomposable base concept to two-component deep-UV chemically amplified resists

Satoru Funato, Norioki Kawasaki, Yoshiaki Kinoshita et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 14 citations

Engineering, Synthetic Photochemistry, Organic Chemistry +21

Linear and nonlinear optical properties of a new organic crystal, N-(4-aminobenzenesulfonyl)acetamide

Hajime Yamamoto, Satoru Funato, Tsunetoshi Sugiyama et al. · Journal of the Optical Society of America B · 1996 · 11 citations

Optical Materials, Engineering, New Organic Crystal +19

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