Concepedia

Zachary Bogusz

ZB

1

Publications

13

Citations

1

H-Index

2011

Active since

Affiliations

SunEdison (United States)(Current)

Zachary Bogusz is an author at SunEdison (United States) specializing in engineering, materials engineering, and electronic packaging.

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Publications per year

2011–2011

1

Publications

1

EUV underlayer materials for 22nm HP and beyond

Huirong Yao, Zachary Bogusz, Jianhui Shan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 13 citations

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