Brian Goodlin

Low open-area endpoint detection using a PCA-based T/sup 2/ statistic and Q statistic on optical emission spectroscopy measurements

David A. White, Brian Goodlin, Aaron E. Gower et al. · IEEE Transactions on Semiconductor Manufacturing · 2000 · 57 citations

Photonics, Engineering, Optical Properties +14

Simultaneous Fault Detection and Classification for Semiconductor Manufacturing Tools

Brian Goodlin, Duane S. Boning, Herbert H. Sawin et al. · Journal of The Electrochemical Society · 2003 · 55 citations

Fault Diagnosis, Reliability Engineering, Engineering +15

Integrated High-frequency Reference Clock Systems Utilizing Mirror-encapsulated BAW Resonators

Ernest Ting-Ta Yen, Brian Goodlin, Ricky Jackson et al. · 2019 · 22 citations

Acoustic Mirrors, Radio Chip, Electrical Engineering +12

Mask undercut in deep silicon etch

Iqbal Saraf, Matthew Goeckner, Brian Goodlin et al. · Applied Physics Letters · 2011 · 15 citations

Engineering, Physics, Mask Undercut +9

A statistical analysis of single and multiple response surface modeling

T. Smith, Brian Goodlin, Duane S. Boning et al. · IEEE Transactions on Semiconductor Manufacturing · 1999 · 11 citations

Engineering, Modeling Method, Computer-aided Design +19