Concepedia

Aaron E. Gower

AE

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Publications

1

Citations

57

H-Index

1

Active since

2000

Affiliations

IBM (United States)(Current)

Aaron E. Gower is an author at IBM (United States) specializing in instrumentation, engineering, and optical characterization.

Top concepts

Publications per year

2000–2000

1

Publications

1

Low open-area endpoint detection using a PCA-based T/sup 2/ statistic and Q statistic on optical emission spectroscopy measurements

David A. White, Brian Goodlin, Aaron E. Gower et al. · IEEE Transactions on Semiconductor Manufacturing · 2000 · 57 citations

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