7
Publications
205
Citations
7
H-Index
1991
Active since
Kent H. Nakagawa is an author at Photometrics (United States) specializing in engineering, applied physics, and computer engineering.
Top concepts
EngineeringApplied PhysicsComputer EngineeringPhotonicsOptoelectronicsOptical PropertiesPhysics3D PrintingCalibrationMicrofabrication
Publications per year
1991–2013
7
7
Hiep-Hoa T. Nguyen, Kent H. Nakagawa, Britt Hedman et al. · Journal of the American Chemical Society · 1996 · 107 citations
Practical technology path to sub-0.10-μm process generations via enhanced optical lithography
J. Fung Chen, Thomas L. Laidig, Kurt E. Wampler et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 15 citations
Engineering, Electron-beam Lithography, Process Generations +17
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