4
Publications
159
Citations
4
H-Index
2000
Active since
Affiliations
Robert Boone is an author at Motorola (United States) specializing in engineering, computer-aided design, and industrial design.
Top concepts
Engineering3D PrintingMicrofabricationNatural SciencesIndustrial DesignComputer-aided DesignMicrostructureMaterial ScienceMultiscale ModelingComputer Engineering
Publications per year
2000–2003
4
4
Model-based dummy feature placement for oxide chemical-mechanical polishing manufacturability
Ruiqi Tian, Martin D. F. Wong, Robert Boone · IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 2001 · 77 citations
Chemical-mechanical Polishing, Engineering, Industrial Engineering +16
Reticle enhancement technology trends
W. D. Grobman, Robert Boone, Cece Philbin et al. · 2001 · 11 citations
Process Correction, Engineering, Electron-beam Lithography +20
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