1
Publications
15
Citations
1
H-Index
1999
Active since
J. Fung Chen is an author specializing in microelectronics, microfabrication, and laser micro-processing.
Top concepts
Photonics3D PrintingEngineeringApplied PhysicsMicroelectronicsMicrofabricationComputer EngineeringLaser Micro-processing
Publications per year
1999–1999
1
1
Practical technology path to sub-0.10-μm process generations via enhanced optical lithography
J. Fung Chen, Thomas L. Laidig, Kurt E. Wampler et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 15 citations
Engineering, Electron-beam Lithography, Process Generations +17
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