Yukifumi Yoshida

SiGe vs. Si Selective Wet Etching for Si Gate-all-Around

Kana Komori, Jens Rip, Yukifumi Yoshida et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2018 · 15 citations

Electrical Engineering, Chemical Engineering, Engineering +13

Wet Selective SiGe Etch to Enable Ge Nanowire Formation

Farid Sebaai, Liesbeth Witters, Frank Holsteyns et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2016 · 13 citations

Electrical Engineering, Chemical Engineering, Integration Scheme +10

Selective Wet Etching in Fabricating SiGe and Ge Nanowires for Gate-all-Around MOSFETs

Wen Dar Liu, Yi‐Chia Lee, Ryo Sekiguchi et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2018 · 10 citations

Engineering, Silicon On Insulator, Semiconductor Device +17