Concepedia
Statistics
Publications
2
Citations
25
H-Index
Active since
2018
Affiliations
SCREEN (Japan)(Current)
Kana Komori is an author at SCREEN (Japan) specializing in engineering, applied physics, and surface science.
Top concepts
EngineeringApplied PhysicsNanoelectronicsSurface ScienceMicroelectronicsMicrofabricationElectrical EngineeringNanotechnologyMaterial ScienceChemical Engineering
Publications per year
2018–2018
SiGe vs. Si Selective Wet Etching for Si Gate-all-Around
Kana Komori, Jens Rip, Yukifumi Yoshida et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2018 · 15 citations
Electrical Engineering, Chemical Engineering, Engineering +13
Selective Wet Etching in Fabricating SiGe and Ge Nanowires for Gate-all-Around MOSFETs
Wen Dar Liu, Yi‐Chia Lee, Ryo Sekiguchi et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2018 · 10 citations
Engineering, Silicon On Insulator, Semiconductor Device +17
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