Concepedia

Alain Duboust

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Publications

6

Citations

240

H-Index

6

Active since

2000

Affiliations

Applied Materials (United States)(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Laboratoire d'Électronique des Technologies de l'Information

Alain Duboust is an author at Applied Materials (United States) specializing in materials science, engineering, and materials engineering.

Publications per year

2000–2022

6

Publications

6

3D Sequential Integration: Application-driven technological achievements and guidelines

P. Batude, Laurent Brunet, C. Fenouillet-Béranger et al. · 2017 · 75 citations

Engineering, Computer Engineering, Electrical Engineering +15

Cu Planarization in Electrochemical Mechanical Planarization

Feng Q Liu, Tianbao Du, Alain Duboust et al. · Journal of The Electrochemical Society · 2006 · 56 citations

Engineering, Electrical Engineering, Materials Engineering +17

Adhesion studies of CVD copper metallization

Srinivas Gandikota, Steve Voss, Rong Tao et al. · Microelectronic Engineering · 2000 · 41 citations

Natural Sciences, Materials Engineering, Materials Science +13

Integrated electro-chemical mechanical planarization (Ecmp) for future generation device technology

Laertis Economikos, X. Wang, X. Sakamoto et al. · 2004 · 25 citations

Engineering, Materials Engineering, Materials Science +16

150 mm SiC Engineered Substrates for High-Voltage Power Devices

Séverin Rouchier, G. Gaudin, J. Widiez et al. · Materials science forum · 2022 · 25 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

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