Concepedia

X. Sakamoto

XS

1

Publications

25

Citations

1

H-Index

2004

Active since

Affiliations

IBM (United States)(Current)

X. Sakamoto is an author at IBM (United States) specializing in materials engineering, surface science, and mechanical engineering.

Top concepts

EngineeringSurface ScienceElectrochemistryMaterial ScienceMicroelectronicsMicrofabricationMaterial ProcessingElectronic PackagingFlexible ElectronicsMaterials Engineering

Publications per year

2004–2004

1

Publications

1

Integrated electro-chemical mechanical planarization (Ecmp) for future generation device technology

Laertis Economikos, X. Wang, X. Sakamoto et al. · 2004 · 25 citations

Engineering, Mechanical Engineering, Electronic Design +19

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