Eugene J. Karwacki

Substituted propyne polymers

Michael Langsam, Madhu Anand, Eugene J. Karwacki · Gas Separation & Purification · 1988 · 95 citations

Materials Science, Engineering, Polymer Science +7

Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

Matti Putkonen, Markus Bosund, Oili Ylivaara et al. · Thin Solid Films · 2014 · 75 citations

Materials Science, Engineering, Silicon On Insulator +8

On the Mechanisms of SiO₂ Thin-Film Growth by the Full Atomic Layer Deposition Process Using Bis(<i>t</i>-butylamino)silane on the Hydroxylated SiO₂(001) Surface

Bo Han, Qingfan Zhang, Jinping Wu et al. · The Journal of Physical Chemistry C · 2011 · 51 citations

Materials Engineering, Chemical Engineering, Sio2 Thin Film +12

On the Dissociative Chemisorption of Tris(dimethylamino)silane on Hydroxylated SiO₂(001) Surface

Jiaye Li, Jinping Wu, Chenggang Zhou et al. · The Journal of Physical Chemistry C · 2009 · 46 citations

Inorganic Chemistry, Chemical Engineering, Engineering +14

Ion energy distributions and optical emission spectra in NF3-based process chamber cleaning plasmas

Hsin-Pai Hsueh, R.T. McGrath, Bing Ji et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 32 citations

Ion Energy Distributions, Optical Emission Spectra, Physics +11