Hsin-Pai Hsueh is an author at Air Products (United States) specializing in instrumentation, natural sciences, and plasma diagnostics.
Publications per year
2001–2001
1
1
Ion energy distributions and optical emission spectra in NF3-based process chamber cleaning plasmas
Hsin-Pai Hsueh, R.T. McGrath, Bing Ji et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 32 citations
Ion Energy Distributions, Optical Emission Spectra, Physics +11
Rows per page
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