Concepedia

Yashesh Shroff

YS

Statistics

Publications

7

Citations

207

H-Index

7

Active since

1999

Affiliations

University of California, Berkeley(Current)

Intel (United States)

Yashesh Shroff is an author at University of California, Berkeley specializing in mask fabrication, engineering, and microfabrication.

Publications per year

1999–2010

7

Publications

7

Maskless extreme ultraviolet lithography

Neha Choksi, D. S. Pickard, M. A. McCord et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 62 citations · Full text

Engineering, Mechanical Engineering, Microfabrication +7

EUV pellicle development for mask defect control

Yashesh Shroff, Michael Goldstein, Bryan J. Rice et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 47 citations

Natural Sciences, Materials Engineering, Materials Science +15

High transmission pellicles for extreme ultraviolet lithography reticle protection

Yashesh Shroff, Michael Leeson, Pei-yang Yan et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 39 citations

Engineering, Materials Engineering, Materials Science +15

Fabrication of parallel-plate nanomirror arrays for extreme ultraviolet maskless lithography

Yashesh Shroff, Yijian Chen, W.G. Oldham · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 25 citations

Engineering, Materials Engineering, Materials Science +14

Optical analysis of mirror-based pattern generation

Yashesh Shroff, Yijian Chen, W.G. Oldham · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 14 citations

Engineering, Manufacturing Engineering, Digital Imaging +11

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