Concepedia
Statistics
Publications
19
Citations
405
H-Index
14
Active since
1986
Affiliations
IMEC(Current)
Inpria (United States)
KU Leuven
Imec the Netherlands
Istituto Officina dei Materiali
Peter De Schepper is an author at IMEC specializing in materials science, electronic materials, and materials engineering.
Publications per year
1986–2024
Integrated fab process for metal oxide EUV photoresist
Andrew Grenville, Jeremy T. Anderson, Benjamin L. Clark et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 83 citations
Natural Sciences, Materials Engineering, Materials Science +15
Metal oxide EUV photoresist performance for N7 relevant patterns and processes
Jason K. Stowers, Jeremy T. Anderson, Brian Cardineau et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 45 citations
Engineering, Materials Engineering, Materials Science +13
SOLAR CELLS WITH 15.6% EFFICIENCY ON MULTICRYSTALLINE SILICON, USING IMPURITY GETTERING, BACK SURFACE FIELD AND EMITTER PASSIVATION
Le Quang Nam, M. Rodot, M Ghannam et al. · International Journal of Solar Energy · 1992 · 28 citations
Engineering, Materials Engineering, Materials Science +17
28nm pitch single exposure patterning readiness by metal oxide resist on 0.33NA EUV lithography
Danilo De Simone, Luka Ključar, Poulomi Das et al. · 2021 · 25 citations
Engineering, Electrical Engineering, Manufacturing Engineering +9
Demonstration of an N7 integrated fab process for metal oxide EUV photoresist
Danilo De Simone, Ming Mao, Michael Kocsis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 21 citations
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