Statistics
Publications
5
Citations
115
H-Index
5
Active since
1993
Paul Ackmann is an author at GlobalFoundries (United States) specializing in microfabrication, input variables, and mask design.
Publications per year
1993–2013
5
5
The impact of 14-nm photomask uncertainties on computational lithography solutions
John L. Sturtevant, Edita Tejnil, Tim Lin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 15 citations
Computing, Computational Engineering, Manufacturing Engineering +17
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