Steven J. Haney

Prototype high-speed tape target transport for a laser plasma soft-x-ray projection lithography source

Steven J. Haney, Kurt W. Berger, Glenn D. Kubiak et al. · Applied Optics · 1993 · 45 citations

Natural Sciences, Physics, Plasma Physics +15

<title>First environmental data from the EUV engineering test stand</title>

Leonard E. Klebanoff, Michael E. Malinowski, Philip A. Grunow et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 23 citations

Engineering, Environmental Engineering, Materials Engineering +10

Recent results in the development of an integrated EUVL laboratory tool

Daniel A. Tichenor, Glenn D. Kubiak, Steven J. Haney et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 16 citations

Engineering, Computer Engineering, Electrical Engineering +12

Sandia Super-EBIS

Robert William Schmieder, C. L. Bisson, Steven J. Haney et al. · Review of Scientific Instruments · 1990 · 13 citations

Natural Sciences, Nuclear Engineering, Physics +14

Initial results from an extreme ultraviolet interferometer operating with a compact laser plasma source

A. K. Raychaudhuri, Kevin D. Krenz, Rodney P. Nissen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 12 citations

Natural Sciences, Physics, Optics +15