Kurt W. Berger

Prototype high-speed tape target transport for a laser plasma soft-x-ray projection lithography source

Steven J. Haney, Kurt W. Berger, Glenn D. Kubiak et al. · Applied Optics · 1993 · 45 citations

Natural Sciences, Physics, Plasma Physics +15

Diffraction-limited soft x-ray projection lithography with a laser plasma source

Glenn D. Kubiak, D. A. Tichenor, Marcin Malinowski et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 23 citations

Engineering, Materials Engineering, Physics +16

Characterization of chemically amplified resists for soft x-ray projection lithography

Glenn D. Kubiak, E. Kneedler, R. Q. Hwang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +12

<title>Initial results from the EUV engineering test stand</title>

Daniel A. Tichenor, Avijit K. Ray-Chaudhuri, Sang Hun Lee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 21 citations

Natural Sciences, Physics, Digital Imaging +8

Sub-100-nm lithographic imaging with an EUV 10X microstepper

J. E. M. Goldsmith, Kurt W. Berger, Dan R. Bozman et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 21 citations

Engineering, Biomedical Engineering, Biomedical Imaging +9