Concepedia

Dan R. Bozman

DR

Statistics

Publications

2

Citations

40

H-Index

2

Active since

1999

Affiliations

Motorola (United States)(Current)

Sandia National Laboratories California

Dan R. Bozman is an author at Motorola (United States) specializing in mask fabrication, numerical aperture, and materials science.

Publications per year

1999–1999

2

Publications

2

Sub-100-nm lithographic imaging with an EUV 10X microstepper

J. E. M. Goldsmith, Kurt W. Berger, Dan R. Bozman et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 21 citations

, , +9

Ultrathin photoresists for EUV lithography

Veena Rao, Jonathan Cobb, Craig C. Henderson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 19 citations

, , +13

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