Concepedia
Statistics
Publications
2
Citations
40
H-Index
Active since
1999
Affiliations
Motorola (United States)(Current)
Sandia National Laboratories California
Dan R. Bozman is an author at Motorola (United States) specializing in microfabrication, applied physics, and engineering.
Top concepts
MicroscopyEngineeringApplied PhysicsMicrofabricationMedicineRadiologyOphthalmologyInstrumentationMedical ImagingOptoelectronics
Publications per year
1999–1999
Sub-100-nm lithographic imaging with an EUV 10X microstepper
J. E. M. Goldsmith, Kurt W. Berger, Dan R. Bozman et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 21 citations
Optical Engineering, Engineering, Electron-beam Lithography +19
Ultrathin photoresists for EUV lithography
Veena Rao, Jonathan Cobb, Craig C. Henderson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 19 citations
Engineering, Electron-beam Lithography, Euv Radiation +17
1–2 of 2