Veena Rao

Structure in Thin and Ultrathin Spin-Cast Polymer Films

C. W. Frank, Veena Rao, M. M. Despotopoulou et al. · Science · 1996 · 471 citations

Materials Science, Ultrathin Films, Polymer Material +12

Comparison of the lithographic properties of positive resists upon exposure to deep- and extreme-ultraviolet radiation

Robert L. Brainard, Craig C. Henderson, Jonathan Cobb et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 40 citations

Short Wavelength Optic, Optical Materials, Engineering +24

Stray losses of polyphase cage-induction motors with particular reference to the condition of imperfect rotor-bar—iron insulation

Veena Rao, O.I. Butler · Proceedings of the Institution of Electrical Engineers · 1969 · 38 citations

Saturation Magnetisation Conditions, Electrical Engineering, Imperfect Rotor-bar—iron Insulation +10

New materials for 157-nm photoresists: characterization and properties

Michael K. Crawford, Andrew E. Feiring, Jerald Feldman et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 29 citations

Optical Materials, Engineering, Electron-beam Lithography +19

Ultrathin photoresists for EUV lithography

Veena Rao, Jonathan Cobb, Craig C. Henderson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 19 citations

Engineering, Electron-beam Lithography, Euv Radiation +17