Concepedia

Rodney P. Nissen

RP

Statistics

Publications

3

Citations

39

H-Index

3

Active since

1995

Affiliations

Sandia National Laboratories California(Current)

University of California, Berkeley

Rodney P. Nissen is an author at Sandia National Laboratories California specializing in extreme ultraviolet lithography, electrical engineering, and microelectronics.

Publications per year

1995–1996

3

Publications

3

Recent results in the development of an integrated EUVL laboratory tool

Daniel A. Tichenor, Glenn D. Kubiak, Steven J. Haney et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 16 citations

, , +12

Initial results from an extreme ultraviolet interferometer operating with a compact laser plasma source

A. K. Raychaudhuri, Kevin D. Krenz, Rodney P. Nissen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 12 citations

, , +15

Fabrication of metal–oxide–semiconductor devices with extreme ultraviolet lithography

K. B. Nguyen, G. F. Cardinale, Daniel A. Tichenor et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 11 citations

, , +14

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