Journal of Materials Chemistry C · 2024 · 32 citations · 76 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials ChemistrySemiconductor DevicesDevice ScalingElectron Beam LithographyOptoelectronic DevicesOptoelectronic MaterialsSemiconductor Device MaterialsThin Film LithographyDevice FabricationExtreme Ultraviolet LithographyOptical LithographyPhotoresist ChemistryPhotoresist DevelopmentPhotoresistsPower Conversion EfficiencyPower Efficiency
The continuous scaling down of semiconductor devices has significantly benefited consumers by enhancing the device performance, portability, power efficiency, and affordability.
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Cramming More Components Onto Integrated Circuits
Gordon E. Moore · Proceedings of the IEEE · 1998 · 5.8K citations
The era of hyper-scaling in electronics
Sayeef Salahuddin, Kai Ni, Suman Datta · Nature Electronics · 2018 · 701 citations
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Christian Wagner, Noreen Harned · Nature Photonics · 2009 · 623 citations