Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey

Abstract

Abstract High-bandwidth nano-positioning stages (NPSs) have boosted the advancement of modern ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast dynamic response, high stiffness and nanoscale resolution. However, the nonlinear actuation, lightly damped resonance and multi-axis cross-coupling effect bring significant challenges to the design, modeling and control of high-bandwidth NPSs. Consequently, numerous advanced works have been reported over the past decades to address these challenges. Here, this article provides a comprehensive review of high-bandwidth NPSs, which covers four representative aspects including mechanical design, system modeling, parameters optimization and high-bandwidth motion control. Besides, representative high-bandwidth NPSs applied to atomic force microscope and fast tool servo are highlighted. By providing an extensive overview of the design procedure for high-bandwidth NPSs, this review aims to offer a systemic solution for achieving operation with high speed, high accuracy and high resolution. Furthermore, remaining difficulties along with future developments in this fields are concluded and discussed.