Exploring the effectiveness of polyhydroxy complexing agents in sapphire chemical mechanical polishing: Combining experiments and theoretical calculation

Xinjie Li, Yida Zou, Xinhuan Niu, Yingqian Jia, Ni Zhan, Jianghao Liu, Chao He, Changxin Dong, Yunhui Shi

Tribology International · 2024 · 13 citations · 46 references

Concepts

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