Changxin Dong

Chemical-mechanical synergies effects of multi-purpose pH regulators on C-, A-, and R-plane sapphire polishing

Yida Zou, Xinhuan Niu, Ni Zhan et al. · Tribology International · 2024 · 22 citations

Engineering, Materials Engineering, Materials Science +9

Effect of amino acid complexing agents on chemical mechanical polishing performance and action mechanism of C-plane sapphire: Combining experiments and theoretical calculations

Yida Zou, Xinhuan Niu, Ni Zhan et al. · Materials Chemistry and Physics · 2024 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +14

Exploring the effectiveness of polyhydroxy complexing agents in sapphire chemical mechanical polishing: Combining experiments and theoretical calculation

Xinjie Li, Yida Zou, Xinhuan Niu et al. · Tribology International · 2024 · 13 citations

Engineering, Materials Engineering, Materials Science +12

Effects of pyrazine and its derivatives as inhibitors on copper film chemical-mechanical polishing properties for ruthenium-based copper interconnect

Ni Zhan, Chao He, Xinhuan Niu et al. · Colloids and Surfaces A Physicochemical and Engineering Aspects · 2024 · 11 citations

Natural Sciences, Materials Engineering, Materials Science +11