Effect of amino acid complexing agents on chemical mechanical polishing performance and action mechanism of C-plane sapphire: Combining experiments and theoretical calculations

Yida Zou, Xinhuan Niu, Ni Zhan, Jianghao Liu, Xinjie Li, Chao He, Changxin Dong, Jianwei Zhou

Materials Chemistry and Physics · 2024 · 14 citations · 55 references

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