High-performance navigation grade resonant beam MEMS accelerometers

Abstract

This paper reports results obtained from two high-performance navigation grade resonant microelectromechanical systems (MEMS) accelerometer: one with a ±25g dynamic range ("RXL25") and the other with a ±100g dynamic range ("RXL100") demonstrating bias errors of 4 μg and 25 μg respectively over an operational temperature range of -40° to 80°C. The total scale factor (SF) residual errors for both accelerometers over temperature are reported to be less than 2 ppm. The bias instability (BI) and velocity random walk (VRW) of RXL25 are measured to be 0.086 μg and 0.40 $\mu {\text{g}}/\sqrt {{\text{Hz}}} $ respectively. The RXL100 accelerometer yields a BI and VRW of 0.34 μg and 0.91 $\mu {\text{g}}/\sqrt {{\text{Hz}}} $ respectively. The vibration rectification coefficient (VRC) for RXL25 is reported to be less than 10 μg/g <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> .