2018 · 65 citations · 6 references
EngineeringEarth SciencesGeophysicsInstrumentationMicroelectromechanical SystemsSensorsEngineering SeismologyMems DesignMems SensorsMems TestingMicroelectromechanical SensorsSeismic InstrumentationBroadband SeismometersInertial MemsMicromachined SensorsMicroseismic Signal ProcessingNoise FloorNoise Floor DeterminationSeismic SensorsSeismometer Design
We report a micromachined silicon seismometer with a sensitivity of 0.25 ng/rtHz from 0.1 to 10 Hz. This represents the highest performance of a MEMS inertial sensor to date, and in particular is at or below the noise floor of the Earth's lowest ambient seismic levels over this bandwidth with a performance comparable to conventional seismometers. The microseismometer is robust to high shock (> 1000 g) and vibration (> 30 g rms), and can operate from +60C to -80 C allowing deployment under harsh conditions.
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