Publication | Closed Access
Investigation of thermal annealing on the characteristics of Sc Al1−N thin films
10
Citations
43
References
2023
Year
Materials ScienceMaterials EngineeringAluminium NitrideMaterial AnalysisEngineeringSurface ScienceApplied PhysicsSemiconductor MaterialThin FilmsThin Film ProcessingMicrostructure
| Year | Citations | |
|---|---|---|
Page 1
Page 1