Binghui Lin

A Novel Trapezoidal ScAlN/AlN-Based MEMS Piezoelectric Accelerometer

Bohao Hu, Yan Liu, Binghui Lin et al. · IEEE Sensors Journal · 2021 · 41 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

A High <i>Q</i> Value ScAlN/AlN-Based SAW Resonator for Load Sensing

Binghui Lin, Yan Liu, Yao Cai et al. · IEEE Transactions on Electron Devices · 2021 · 32 citations

Engineering, Electrical Engineering, Materials Science +10

Spurious-Free S₁ Mode AlN/ScAlN-Based Lamb Wave Resonator With Trapezoidal Electrodes

Qinwen Xu, Zhiwei Wen, Yuanhang Qu et al. · IEEE Electron Device Letters · 2023 · 24 citations

Natural Sciences, Electrical Engineering, Materials Science +11

Investigation of film bulk acoustic resonators for sensing applications in liquid environment

Yu Zhou, Yang Zou, Chao Gao et al. · Applied Physics Letters · 2022 · 15 citations

Natural Sciences, Materials Science, Physics +17

Effects of growth temperature and reactor pressure on AlN thin film grown by metal-organic chemical vapor deposition

Binghui Lin, Yao Cai, Yaxin Wang et al. · Thin Solid Films · 2023 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +17