Impact on DC and analog/RF performances of SOI based GaN FinFET considering high-k gate oxide

Abstract

This paper suggests an analysis of SOI-based GaN FinFETs that considers high-k gate oxide into account. The effect of using SOI substrate and a high-k dielectric layer on ON current, OFF current, electric field, electron mobility, conduction & valence band energy, and subthreshold swing is reported. All these parameters are analyzed and compared with bulk GaN FinFET and Si FinFET. We achieve better on current, faster speed, and more minor subthreshold swing, reducing the short channel effects. A shallow OFF current is obtained because of bulk conduction in the GaN channel area, which the gate can deplete. Several RF/analog metrics are also noted, including transconductance (gm), cut-off frequency (fT), transconductance frequency product (TFP), and transconductance generation factor (TGF), and comparison with Bulk GaN FinFET and Si FinFET is presented. Finally, the linearity metrics like 2nd and 3rd-order voltage intercept points, IIP3, and 1-dB compression point is extracted. Compared to the other two structures, the suggested structure exhibits advantageous DC and RF/analog performances. A comparison of different Figures of Merit (FoMs) for the suggested device with previously published literature is also given.