Inductively coupled plasma etching of bulk tungsten for MEMS applications

Phase retrieval and differential phase-contrast imaging with low-brilliance X-ray sources

Franz Pfeiffer, Timm Weitkamp, Oliver Bunk et al. · Nature Physics · 2006 · 1.9K citations

Natural Sciences, Biomedical Engineering, Radiology +16

Plasma etching: principles, mechanisms, application to micro- and nano-technologies

Christophe Cardinaud, Marie-Claude Peignon, Pierre‐Yves Tessier · Applied Surface Science · 2000 · 232 citations

Engineering, Electrical Engineering, Materials Science +12

A study on the fine-finish die-sinking micro-EDM of tungsten carbide using different electrode materials

Muhammad P. Jahan, Y.S. Wong, M. Rahman · Journal of Materials Processing Technology · 2008 · 221 citations

Natural Sciences, Materials Engineering, Materials Science +8

Optimization of wire electrical discharge machining for pure tungsten using a neural network integrated simulated annealing approach

Hsien‐Ching Chen, Jen-Chang Lin, Yung‐Kuang Yang et al. · Expert Systems with Applications · 2010 · 136 citations

Engineering, Materials Engineering, Materials Science +7

High-aspect-ratio bulk micromachining of titanium

Marco Aimi, Masaru P. Rao, Noel C. MacDonald et al. · Nature Materials · 2004 · 130 citations

Engineering, Materials Engineering, Materials Science +11